Poland - Various special-purpose machines

Description

The subject of the contract is the delivery of an ALD (Atomic Layer Deposition System) growth system with the following technical and functional requirements:- 6 precursor ports with heating jackets and cylinders of no more than 50 ml capacity - with only one entry of a set of precursors into the substrate area - with a reaction chamber of up to 250 mm in diameter integrated in a heated vapour trap- a reaction chamber volume of not more than 0,5 litre,- the path of the precursor to the surface on which the deposition process is to take place, not more than 10 cm,- the precursors of oxide materials: Al2O3, SiO2, TiO2, ITO, HfO2, ZnO, AZO and ZrO2, Mg and Ca - without water cooling for any part of the system, also for components and peripherals, - with stainless steel column filled with dry granulate to neutralize exhaust gases,- with a computer with Windows system providing access to a database with parameters of standard growth processes, - with an ozone generator with a concentration of about 200 ng/mL, - with a built-in quartz microweight to monitor the process of layer growth in real time at temp. to the mines. A detailed description of the subject of the contract has been specified in the ToR and the model contract, available on the Ordering Party's website https://www.fuw.edu.pl/zamowienia-publiczne.html

Opportunity closing date

19 September 2019

Value of contract

to be confirmed