Germany - Laboratory equipment, optical instruments and precision instruments (except glasses)

Description

For a research project AMO needs a plasma ALD system for deposition of homogeneous dielectric Al2O3 layers on a defined layer system (monolayer hBN/graph). The encapsulation by the Al2O3 layer must be carried out in such a way that damage to the underlying layer system by the action of the plasma is as low as possible.
For a research project AMO needs a plasma ALD system for the deposition of homogeneous dielectric Al2O3 layers on a defined layer system (monolayer hBN/graph). The encapsulation by the Al2O3 layer must be carried out in such a way that damage to the underlying layer system by the action of the plasma is as low as possible. The following objectives are of primary importance:- AMO places high demands on the quality of the Plasma ALD system, taking into account the economic efficiency;- since the Plasma ALD system is needed in the short term, it is important for AMO that the delivery is made at short notice (a few months);- for use in the current research project, there are a number of necessary specifications that the device must meet. Please refer to the service description.

Opportunity closing date

03 August 2020

Value of contract

£1m-5m