Germany - Laboratory equipment, optical instruments and precision equipment (except glasses)

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Details

Provided by Open Opps
Opportunity closing date
30 March 2023
Opportunity publication date
04 March 2023
Category
38000000
Value of contract
to be confirmed
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Description

A system for plasma-activated chemical vapor deposition (PECVD) for processing semiconductor structures and optical dielectrics is being tendered. The dielectrics to be deposited find application as insulation layer, passivation layer, hard masks for etching processes, anti-reflective coating, dielectric mirrors and micro-electro-mechanical tunable systems (MEMS).
Desirable equipment:- Exhaust gas cleaning/scrubber to match the large-scale equipment.If exhaust gas cleaning is not part of the bid, the manufacturer for a matching exhaust gas cleaning system must be provided, including the necessary specifications (type, throughput, filter material, annual quantity). Estimated process hours /year: 770h

Opportunity closing date
30 March 2023
Value of contract
to be confirmed

About the buyer

Address
Technische Universit├Ąt Darmstadt Karolinenplatz 5 Darmstadt 64289 Germany
Contact
vergabestelle@pvw.tu-darmstadt.de

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