Finland - Laboratory, optical and precision equipments (excl. glasses)

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Details

Provided by Open Opps
Opportunity closing date
15 January 2020
Opportunity publication date
16 December 2019
Category
38000000: Laboratory, optical and precision equipments (excl. glasses)
Value of contract
to be confirmed
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Description

The ALD reactor must be of a hot wall flow type reactor with a loadlock. Besides its normal operation, the loadlock must allow connection to the UHV cluster so that samples can be transferred to the UHV loadlock and further to the UHV cluster and analytical chambers. Samples are not full wafers but smaller pieces which in the ALD reactor are placed on a wafer size carrier. The reactor should have at least 2 solid (heated) sources, 2 liquid (non-heated) sources and at least 1 gas inlet. The reaction chamber must have an operation temperature of at least 450 ºC. The reactor must be compatible with metal halides and other common ALD precursors (exceptions should be mentioned). The substrate size must be 100 mm wafers in minimum. The reactor must have windows for connecting an ellipsometer (FilmSense, already owned by the buyer) on a loadlock in minimum, but if possible directly to the chamber. Plasma source must be offered as an option. Ozone generator can be offered as an option. QCM and/or QMS can also be offered as options, but their proper operation for representative reaction mechanism studies need to be demonstrated. Also other options like FTIR can be offered. UHV cluster must contain at least XPS (X-ray photoelectron spectroscopy) and TPD (temperature programmed desorption) instruments in separate chambers, optionally also a FTIR chamber. There must also be a distribution chamber(s) and system for transferring the samples between the analysis chambers and loadlocks. Samples are not full wafers but smaller pieces which in the ALD reactor are placed on a wafer size carrier from which they are picked for further transfer in the UHV cluster. One should also be able to return from the UHV side to the ALD reactor. There must also be a loadlock for a direct introduction of samples to the UHV cluster. XPS must be optimised for measuring chemical shifts: resolution and high count rate are emphasised. Sample holder should allow heating the sample up to at least 700 ºC. Ion beam gun for depth profiling and flood source for neutralising positive charging samples are also needed. Accessories to the XPS chamber should be offered; these may contain, but are not limited to, imaging XPS, ARXPS, ARPES, UPS, ISS, AES, EELS, LEED. TPD should have in minimum a mass spectrometer up to 300 amu and a port for gas inlet.

Opportunity closing date
15 January 2020
Value of contract
to be confirmed

About the buyer

Address
University of Helsinki/Chemistry Department Yliopistonkatu 3 Helsinki 00014 Finland
Contact
hankinnat@helsinki.fi

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